Work

Ecr Ion/free-radical Plasma Source Simulation In Two And Three Dimensions

Year: 2005

Type: conference-paper

Source: IEEE International Conference on Plasma Science (ICOPS)

DOI: 10.1109/plasma.1994.588710

Authors: V. Gopinath, T.A. Grotjohn

Institution: Michigan State University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2145821091

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Cites: 2

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Related to: 10