Plasma-assisted hot filament chemical vapor deposition of AlN thin films on ZnO buffer layer: toward highly c-axis-oriented, uniform, insulative films
Year: 2014
Type: article
Source: Applied Physics A
Authors: M. Alizadeh, H. Mehdipour, V. Ganesh, A. N. Ameera, B. T. Goh, A. Shuhaimi, S. A. Rahman
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2145877927