Work

Compact 3D Microfluidic Channel Structures Embedded in Glass Fabricated by Femtosecond Laser Direct Writing

Year: 2013

Type: article

Abstract: We demonstrate rapid fabrication of complex three-dimensional (3D) microfluidic channels with lengths up to ~6.0 cm within a tiny volume down to ~80 nl in glass substrates by femtosecond laser direct writing, which, to the best of our knowledge, is the longest microfluidic channel directly embedded in glass by femtosecond laser microprocessing.The fabrication mainly includes the following two steps: (1) formation of hollow microfluidic channels in porous glass by scanning a tightly focused femtosecond laser beam inside a porous glass immersed in water; and (2) postannealing of the fabricated porous glass sample at ~1150 °C for consolidation of the sample.The unique 3D capability of our technique allows construction of extremely compact microfluidic devices and systems.

Source: Journal of Laser Micro/Nanoengineering

DOI: 10.2961/jlmn.2013.02.0010

Author: Changning Liu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, State Key Laboratory of High Field Laser Physics

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G1639592243, G3936247254, G4228605061, G6063550564, G7634114123