Work

Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation

Year: 1999

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/27.763060

Authors: T.M. Minea, J. Bretagne, G. Gousset

Institutions: Université Paris-Sud, Centre National de la Recherche Scientifique, Laboratoire de Physique des Gaz et des Plasmas

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2147755674

FWCI: 2.566

Cites: 6

Cited by: 22

Related to: 10