Work

Fine-pitch MOEMS packaging for novel Spatial Light Modulator

Year: 2008

Type: conference-paper

Source: IEEE Electronic Components and Technology Conference (ECTC)

DOI: 10.1109/ectc.2008.4550061

Authors: Heung Woo Park, Yeong Gyu Lee, Chang Su Park, Ohk Kun Lim, Dong Hyun Park, Seok Kee Hong, Young Nam Hwang, Jong Hyeong Song, Yun Joon Choi, Sang Kyeong Yun

Institution: Samsung (South Korea)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Korea University

OpenAlex ID: W2152125033

FWCI: 2.365

Cites: 7

Cited by: 6

Related to: 10