Work

Experimental analyses of the mechanical reliability of advanced BEOL/fBEOL stacks regarding CPI loading

Year: 2013

Type: conference-paper

Source: IEEE International Reliability Physics Symposium proceedings

DOI: 10.1109/irps.2013.6532030

Authors: H. Geisler, E. Schuchardt, M. Brueckner, P. Hofmann, K. V. Machani, F. Kuechenmeister, D. Breuer, H. Engelmann

Institution: GlobalFoundries (Germany)

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2152249156

FWCI: 8.012

Cites: 21

Cited by: 11

Related to: 10