Work

Microfabrication of Ceramics by Filling of Photoresist Molds

Year: 2000

Type: article

Source: Advanced Materials

DOI: 10.1002/1521-4095(200009)12:17<1261::aid-adma1261>3.0.co;2-4

Authors: U. P. Schönholzer, R. Hummel, L. J. Gauckler

Institution: ETH Zurich

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2153620344

FWCI: 3.916

Cites:

Cited by: 55

Related to: 10