Fabrication of Tunable InP/Air-gap Fabry-Perot Cavities by Selective Etching of InGaAs Sacrificial Layers
Year: 1999
Type: article
Source: Physica Scripta
Authors: Nicolae Chitica, J?rgen Daleiden, Jonas Bentell, Janos Andr?, Martin Strassner, Staffan Greek, Donato Pasquariello, Mikael Karlsson, Ram Gupta, Klas Hjort
Institutions: KTH Royal Institute of Technology, Uppsala University
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2154570816