Dual beam depth profiling of polymer materials: comparison of C 60 and Ar cluster ion beams for sputtering
Year: 2012
Type: article
Source: Surface and Interface Analysis
DOI: 10.1002/sia.5122
Authors: D. Rading, R. Moellers, H.‐G. Cramer, E. Niehuis
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2155195512