Work

A one-dimensional fluid model for an acetylene RF discharge: a study of the plasma chemistry

Year: 2003

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/tps.2003.815249

Authors: D. Herrebout, A. Bogaerts, R. Gijbels, W.J. Goedheer, A. Vanhulsel

Institutions: University of Antwerp, Flemish Institute for Technological Research

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2156244580

FWCI: 1.654

Cites: 27

Cited by: 37

Related to: 10