Work

"Smart cut": a promising new SOI material technology

Year: 2002

Type: conference-paper

Source: IEEE International SOI Conference (SOI)

DOI: 10.1109/soi.1995.526518

Authors: M. Bruel, B. Aspar, B. Charlet, C. Maleville, T. Poumeyrol, A. Soubie, A.J. Auberton-Herve, J.M. Lamure, T. Barge, F. Metral, S. Trucchi

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Soitec (France)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2159754341

FWCI: 4.623

Cites: 4

Cited by: 59

Related to: 10