Work

Numerical investigation of particle formation mechanisms in silane discharges

Year: 2004

Type: article

Source: Physical Review E

DOI: 10.1103/physreve.69.056409

Authors: Kathleen De Bleecker, Annemie Bogaerts, Renaat Gijbels, Wim Goedheer

Institution: University of Antwerp

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2160797702

FWCI: 6.332

Cites: 50

Cited by: 109

Related to: 10