Work

Accuracy improvement of the "Single Pattern Driver" method for the characterization of interconnect capacitance in the context of nanometer technology development

Year: 2004

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts.2004.1309501

Authors: H. Brut, S. Martin, B. Froment

Institution: STMicroelectronics (France)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2161978425

FWCI: 0.83

Cites: 7

Cited by: 4

Related to: 10