Work

Impact of Production Control and System Factors in Semiconductor Wafer Fabrication

Year: 2008

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2008.2001214

Authors: Chao Qi, A.I. Sivakumar, S.B. Gershwin

Institutions: Nanyang Technological University, Massachusetts Institute of Technology

Language: English

Topic: Scheduling and Optimization Algorithms

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2164036719

FWCI: 5.345

Cites: 30

Cited by: 29

Related to: 10