Wafer fusion: materials issues and device results
Year: 1997
Type: article
DOI: 10.1109/2944.640648
Authors: A. Black, A.R. Hawkins, N.M. Margalit, D.I. Babic, A.L. Holmes, Y.-L. Chang, P. Abraham, J.E. Bowers, E.L. Hu
Institution: University of California, Santa Barbara
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2166138619