Work

Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

Year: 2011

Type: article

Source: Precision Engineering

DOI: 10.1016/j.precisioneng.2011.05.001

Authors: Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji

Institutions: The University of Tokyo, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Education, Culture, Sports, Science and Technology, Japan Society for the Promotion of Science

Award: Estimation Method of Unvertainty on Nanometer Three Dimensional Measurement

OpenAlex ID: W2166444037

FWCI: 3.401

Cites: 23

Cited by: 22

Related to: 10