Work

Low-Temperature Fast Growth of Polycrystalline Silicon Thin Film from SiCl4 Light-Diluted Hydrogen by PECVD

Year: 2006

Type: conference-paper

Source: World Conference on Photovoltaic Energy Conversion

DOI: 10.1109/wcpec.2006.279818

Authors: Xuanying Lin, Rui Huang, Kuixun Lin, Yunpeng Yu, Junhong Wei, Zusong Zhu

Institution: Shantou University

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2168316111

FWCI:

Cites: 9

Cited by: 1

Related to: 10