Work

Effect of nitrogen doping on piezoresistive properties of a-Si x C y thin film strain gauges

Year: 2010

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-010-1033-9

Authors: M. A. Fraga, H. Furlan, M. Massi, I. C. Oliveira

Institutions: Instituto Tecnológico de Aeronáutica, Faculdade de Tecnologia de São Paulo

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Conselho Nacional de Desenvolvimento Científico e Tecnológico

OpenAlex ID: W2169529400

FWCI: 2.145

Cites: 8

Cited by: 16

Related to: 10