Work

Low-Temperature Direct Bonding of Borosilicate, Fused Silica, and Functional Coatings

Year: 2010

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/1.3483523

Authors: Marko Eichler, Benedikt Michel, Philipp Hennecke, Markus Gabriel, Claus-Peter Klages

Institutions: Fraunhofer Institute for Surface Engineering and Thin Films, Technische Universität Braunschweig, SUSS MicroTec (Germany)

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Technische Universität Chemnitz, Bundesministerium für Wirtschaft und Technologie

OpenAlex ID: W2170021981

FWCI: 0.856

Cites:

Cited by: 17

Related to: 10