Monolithic Suspended Optical Waveguides for InP MEMS
Year: 2004
Type: article
Authors: D.P. Kelly, M.W. Pruessner, K. Amarnath, M. Datta, S. Kanakaraju, L.C. Calhoun, R. Ghodssi
Institution: University of Maryland, College Park
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2170102287