Bonding properties and their relation to residual stress and refractive index of amorphous Ta(N,O) films investigated by x-ray absorption spectroscopy
Year: 2005
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.1905784
Authors: J. C. Jan, P. D. Babu, H. M. Tsai, C. W. Pao, J. W. Chiou, S. C. Ray, K. P. Krishna Kumar, W. F. Pong, M.-H. Tsai, C. A. Jong, T. S. Chin
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2170285802