Work

Device Applications of Rapid Thermal Processing

Year: 1983

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-23-37

Authors: J. F. Gibbons, D. M. Dobkin, M. E. Greiner, J. L. Hoyt, W. G. Opyd

Institution: Stanford University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2170398317

FWCI: 0.552

Cites: 10

Cited by: 3

Related to: 10