Strained epilayers effectively reduce plasma-induced fluorine damage in P-HEMTs
Year: 2005
Type: article
Authors: H. Uchiyama, T. Taniguchi, M. Kudo
Institution: Hitachi (Japan)
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: Waseda University
OpenAlex ID: W2171152010