Year: 2015
Type: article
Abstract: Nanostructured diamond‐like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off‐axis position. The configuration utilized high density plasma plume arriving at low effective angle for the formation of nanostructured DLC. Nanostructures with maximum size of 50 nm were deposited as compared to the ultrasmooth DLC films obtained in a conventional deposition. The Raman spectra of the films confirmed that the films were diamond‐like/amorphous in nature. Although grown at an angle, ion energy of >35 eV was obtained at the off‐axis position. This was proposed to be responsible for subplantation growth of sp3 hybridized carbon. The condensation of energetic clusters and oblique angle deposition correspondingly gave rise to the formation of nanostructured DLC in this study.
Source: Journal of Nanomaterials
DOI: 10.1155/2015/731306
Authors: Seong Shan Yap, Chen Hon Nee, Seong Ling Yap, Teck Yong Tou
Institutions: Multimedia University, University of Malaya
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $2,375
OpenAlex ID: W2179029964
