Work

Suppression of Mechanical Coupling

Year: 2000

Type: article

Authors: Hiroshi Sato, Toshio Fukuda, F. Arai, Kouichi Itoigawa, Y. Tsukahara

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2188951007

FWCI:

Cites: 4

Cited by:

Related to: 10