Work

Power System Requirements for Enhanced Mid-Frequency Process Stability

Year: 2003

Type: article

Authors: D.J. Christie, E. Seymour

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2189070710

FWCI:

Cites: 6

Cited by:

Related to: 10