Work

Failure Analysis Work Flow for Electrical Shorts in Triple Stacked 3D TSV Daisy Chains

Year: 2015

Type: conference-paper

Source: IMAPSource Proceedings

DOI: 10.4071/isom-2015-wp51

Authors: J. Gaudestad, A. Orozco, I. De Wolf, T. Wang, T. Webers, R. Kelley, T. Morrison, S. Madala

Institutions: Neocera (United States), IMEC, KU Leuven

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2195710941

FWCI: 1.665

Cites: 10

Cited by: 6

Related to: 10