Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices
Year: 2010
Type: book-chapter
Abstract: This chapter focuses on two emerging nanotechnologies developed to fabricate, organize and integrate nanomaterials (nanodots, nanowires) in nanoelectronics devices. The first one uses the natural properties of diblock copolymers to create (i) a hexagonal lattice array of vertical PMMA cylinders in a polystyrene (PS) matrix, or (ii) an ordered array of horizontal PMMA cylinders in a PS matrix. These films are then used as deposition and/or etching masks to produce dense lattices of 20 nm diameter nanoparticles and nanowires with a density of around 1011 cm-2. The chapter presents examples of integration with an 8-inch wafer memory technology. The second technology is based on chemical vapor deposition (CVD) of basic nanomaterial building blocks for future microelectronics. The chapter focuses on CVD growth of silicon nanostructures using a fully compatible CMOS process. The resulting nano-objects are integrated in test devices and measured electrically. Controlled Vocabulary Terms chemical vapour deposition; nanoelectronics; polymerisation
Source: Wiley eBooks
Institutions: Centre National de la Recherche Scientifique, Université Joseph Fourier, Laboratoire des Technologies de la Microélectronique, Institut polytechnique de Grenoble, Institut de Microélectronique, Electromagnétisme et Photonique, Centre de Radiofréquences, Optique et Micro-nanoélectronique des Alpes, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, CEA Grenoble, Institut Nanosciences et Cryogénie
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
Funder: Agence Nationale de la Recherche
OpenAlex ID: W2199354036