Work

A Two-dimensional Steady State Simulation Study on the Radio Frequency Inductively Coupled Argon Plasma

Year: 2002

Type: article

Source: KIEE International Transactions on Electro-Physics and Application

Authors: Ho‐Jun Lee, Donghyun Kim, Chung‐Hoo Park

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2201521640

FWCI:

Cites: 1

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Related to: 10