Work

Towards New Interferometer Technology for Surface Metrology

Year: 2012

Type: conference-paper

Abstract: There is an increasing requirement from manufacturing industries for improved technologies to measure surface topography. New instruments have to be accurate; robust to be used on the industry floor; non-invasive; automatic; and sufficiently fast to be used in real time as well as to simultaneously measure over a large area. The industrial applications are plenty: On-line quality control of machined parts, Direct feed back to the manufacturing process, Analysis and selection of surface texture/structure. This paper presents new developments in interferometer techniques for new robust area-based topographic instruments.

Source: KTH Publication Database DiVA (KTH Royal Institute of Technology)

Authors: L. Bååth, Bengt-Göran Rosén

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W223301371

FWCI:

Cites: 1

Cited by: 2

Related to: 10