Rigorous coupled-wave analysis for multilayered grating structures
Year: 2003
Type: conference-paper
DOI: 10.1117/12.473179
Authors: Wook Lee, Fahrettin L. Degertekin
Institution: Georgia Institute of Technology
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2242024975