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Design for Manufacturing and Integration of Microelectro- Mechanical-Systems

Year: 2005

Type: conference-paper

Source: Proceedings of the ... International Conference on Engineering Design

Authors: Robert Watty, Hansgeorg Binz

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2257512697

FWCI:

Cites: 7

Cited by: 2

Related to: 10