Comparison study of electromagnetic wave propagation in high and low pressure Ar inductively coupled plasma
Year: 2016
Type: article
Source: Vacuum
Authors: Xiaolong Wei, Haojun Xu, Min Lin, Huimin Song
Institution: Air Force Engineering University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: 射频放电等离子体/超声速激波耦合作用的机制研究
OpenAlex ID: W2283371385