Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera
Year: 2015
Type: article
Abstract: This work presents the procedures used at Argonne National Laboratory to fabricate large arrays of multichroic transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) measurements. These detectors will be assembled into the focal plane for the SPT-3G camera, the third generation CMB camera to be installed in the South Pole Telescope. The complete SPT-3G camera will have approximately 2690 pixels, for a total of 16 140 TES bolometric detectors. Each pixel is comprised of a broad-band sinuous antenna coupled to a Nb microstrip line. In-line filters are used to define the different bands before the millimeter-wavelength signal is fed to the respective Ti/Au TES bolometers. There are six TES bolometer detectors per pixel, which allow for measurements of three band-passes (95, 150 and 220 GHz) and two polarizations. The steps involved in the monolithic fabrication of these detector arrays are presented here in detail. Patterns are defined using a combination of stepper and contact lithography. The misalignment between layers is kept below 200 nm. The overall fabrication involves a total of 16 processes, including reactive and magnetron sputtering, reactive ion etching, inductively coupled plasma etching and chemical etching.
Authors: C M Posada, P A R Ade, Z Ahmed, K Arnold, J E Austermann, A N Bender, L E Bleem, B A Benson, K Byrum, J E Carlstrom, C L Chang, H M Cho, S T Ciocys, J F Cliche, T M Crawford, A Cukierman, D Czaplewski, J Ding, R Divan, T de Haan, M A Dobbs, D Dutcher, W Everett, A Gilbert, N W Halverson, N L Harrington, K Hattori, J W Henning, G C Hilton, W L Holzapfel, J Hubmayr, K D Irwin, O Jeong, R Keisler, D Kubik, C L Kuo, A T Lee, E M Leitch, S Lendinez, S S Meyer, C S Miller, J Montgomery, M Myers, A Nadolski, T Natoli, H Nguyen, V Novosad, S Padin, Z Pan, J Pearson, J E Ruhl, B R Saliwanchik, G Smecher, J T Sayre, E Shirokoff, L Stan, A A Stark, J Sobrin, K Story, A Suzuki, K L Thompson, C Tucker, K Vanderlinde, J D Vieira, G Wang, N Whitehorn, V Yefremenko, K W Yoon, K E Ziegler
Institutions: Argonne National Laboratory, Cardiff University, SLAC National Accelerator Laboratory, Kavli Institute for Particle Astrophysics and Cosmology, Stanford University, University of California System, University of California San Diego, National Institute of Standards and Technology, University of Colorado Boulder, University of Chicago, Fermi National Accelerator Laboratory, McGill University, University of California, Berkeley, Center for Nanoscale Materials, Canadian Institute for Advanced Research, High Energy Accelerator Research Organization, Lawrence Berkeley National Laboratory, University of Illinois Urbana-Champaign, University of Illinois System, California Institute of Technology, Case Western Reserve University, Center for Astrophysics Harvard & Smithsonian, Three-Speed Logic (Canada), University of Toronto
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,325
Awards: G102163711, G107546177, G1286251239, G1313983767, G1664757510, G2287611682, G262962599, G3075337988, G426311843, RESEARCH ON ELEMENTARY PARTICLE PHYSICS, G498139845, Signatures of Cosmic Inflation: High-Resolution Studies of the Cosmic Microwave Background, G513797252, Cosmological Research with the 10 meter South Pole Telescope, Physics Frontier Center at the Kavli Institute for Cosmological Physics: Pushing Cosmology to the Edge, G5387317844, CAREER: Large focal plane array development for CMB polarization studies with the South Pole Telescope, G6848031779, G6918803902, G7583137537, G969889393, G993149817
OpenAlex ID: W2292700979