Work

Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

Year: 2015

Type: article

Source: Chinese Physics B

DOI: 10.1088/1674-1056/24/12/125201

Authors: H. Kakati, S. M. Borah

Institutions: Jorhat Institute of Science and Technology, Gauhati University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2297598342

FWCI: 0.14

Cites: 25

Cited by: 5

Related to: 10