Work

Investigation and optimization of Rowland ghosts in high efficiency spectrometer gratings fabricated by e-beam lithography

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2211000

Authors: Martin Heusinger, Michael Banasch, Thomas Flügel-Paul, Uwe D. Zeitner

Institutions: Vistec Electron Beam (Germany), Fraunhofer Institute for Applied Optics and Precision Engineering

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2299155013

FWCI: 6.644

Cites: 8

Cited by: 8

Related to: 10