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Hydrogen Radical Generation and Characterization of a Remote Plasma Source

Year: 2015

Type: conference-paper

Source: SVC ... Annual Technical Conference proceedings - Society of Vacuum Coaters. Technical Conference/Proceedings of the annual technical conference/Society of Vacuum Coaters Technical Conference proceedings

DOI: 10.14332/svc15.proc.1925

Authors: Scott Polak, D. Carter, A. Bhoj, ESI Group, A. Roy, ESI Group

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2315936743

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