Work

Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching

Year: 2015

Type: article

Source: Chinese Journal of Lasers

DOI: 10.3788/cjl201542.0103007

Authors: 李艳娜 Li Yanna, 陈涛 Chen Tao, 潘安 Pan An, 司金海 Si Jinhai, 侯洵 Hou Xun

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2319601902

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