Work

Role of Hydrogen for Microcrystalline Silicon Formation

Year: 1998

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-507-843

Authors: K. Saitoh, M. Kondo, M. Fukawa, T. Nishimiya, W. Futako, I. Shimizu, A. Matsuda

Institution: Tokyo Institute of Technology

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2321567057

FWCI: 1.419

Cites: 15

Cited by: 10

Related to: 10