Work

Comparison study of diffraction based overlay and image based overlay measurements on programmed overlay errors

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2218163

Authors: Haiyong Gao, Woong Jae Chung, Nyan Aung, Lokesh Subramany, Pavan Samudrala, Juan-Manuel Gomez

Institution: GlobalFoundries (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2324258045

FWCI:

Cites: 6

Cited by: 5

Related to: 10