Work

Erratum to “A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS” [DOI: 10.1109/JMEMS.2015.2432054]

Year: 2015

Type: erratum

Abstract: In the above paper[1], references [32]–[38] were inadvertently removed and are as follows.

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2015.2452791

Authors: Bram Krijnen, Koen R. Swinkels, Dannis M. Brouwer, Leon Abelmann, Just L. Herder

Institutions: Demcon (Netherlands), University of Twente

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2325449482

Cites: 8

Cited by:

Related to: 10