Work

X-Ray Lithography Station at Super-ACO : Lithography Technology

Year: 1989

Type: article

Source: JJAP series

Authors: F. Rpusseaux, C. Khsn-Mslek, Brahim Kebabi, Jean Rosiu, J. Bourneix, D. Decanini, P. Darre, H. Crepin, H. Launois, C. Depautex, Petra Pernot, M. Lemonnier

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W232811080

FWCI: 0.461

Cites:

Cited by: 1

Related to: 10