Work

Temperature measurement and characterization of large volume microwave discharges

Year: 1999

Type: conference-paper

Source: AIAA Plasmadynamics and Lasers Conference

DOI: 10.2514/6.1999-3432

Authors: Jon Lewis, Igor Adamovich, Walter Lempert, John Brandenburg, John Kline

Institutions: The Ohio State University, Research Support Instruments (United States)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2332008603

FWCI:

Cites: 5

Cited by: 1

Related to: 10