Work

A Novel Silicon-Carbon Precursor for Oligomer Chemical Vapor Deposition of Silicon Carbide for Harsh Environmental Applications

Year: 2001

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-697-p5.7

Authors: Ulrike Futschik, Harry Efstathiadis, James Castracane, Alain E. Kaloyeros, Leo Macdonald, Susan Hayes, Costas Fountzoulas

Institutions: University at Albany, State University of New York, Starfire Systems (United States), DEVCOM Army Research Laboratory

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2334820366

FWCI:

Cites: 13

Cited by:

Related to: 10