Work

Low-loss passive waveguides in a generic InP foundry process via local diffusion of zinc

Year: 2015

Type: article

Abstract: Generic InP foundry processes allow monolithic integration of active and passive elements into a common p-n doped layerstack. The passive loss can be greatly reduced by restricting the p-dopant to active regions. We report on a localized Zn-diffusion process based on MOVPE, which allows to reduce waveguide loss from 2 dB/cm to below 0.4 dB/cm. We confirm this value by fabrication of a 73 mm long spiral ring resonator, with a record quality factor of 1.2 million and an extinction ratio of 9.7 dB.

Source: Optics Express

DOI: 10.1364/oe.23.025143

Authors: Domenico D’Agostino, Giuseppe Carnicella, Caterina Ciminelli, Peter Thijs, Petrus J. Veldhoven, Huub Ambrosius, Meint Smit

Institutions: Eindhoven University of Technology, Polytechnic University of Bari

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

OpenAlex ID: W2341235459

FWCI: 2.402

Cites: 21

Cited by: 45

Related to: 10