Design and Fabrication of Micro-Opto-Mechanical Vibration Sensor
Year: 2006
Type: article
Source: Microfabrication Technology
Authors: Fengyan Lun, Ping Zhang
Institution: United States Government Accountability Office
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2377069645