Work

Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

Year: 2016

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-016-2962-8

Authors: Huichao Shi, Shangchun Fan, Yuwen Zhang

Institutions: Beijing University of Chemical Technology, Beihang University, University of Missouri

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2383176831

FWCI: 0.305

Cites: 25

Cited by: 4

Related to: 10