Year: 2016
Type: article
Abstract: Focused ion beam technology is key to both academic and industrial sample processing, for material deposition or ablation, but its progress toward nanometer resolution is hampered by chromatic aberration of the beam. The authors use laser cooling, a magneto-optical trap, and photoionization to deliver a well-controlled, low-energy, low-current ion beam with a narrow energy spread. Their ion source is a promising basis to advance the state of the art.
Source: Physical Review Applied
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2394844343