Work

Advanced bulk and thin film materials for harsh environment MEMS applications

Year: 2014

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-85709-211-3.00017-0

Authors: Cinzia Caliendo, Fabio Lo Castro

Institution: Institute of Acoustics and Sensors "Orso Mario Corbino"

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W243990964

FWCI: 1.269

Cites: 122

Cited by: 4

Related to: 10