Work

THE USE OF HCl PASSIVATION IN THE PROCESSING TECHNOLOGY OF MOSFET DEVICES

Year: 1973

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.1973.11-3

Authors: R. J. Kriegler, A. Aitken, J. D. Morris

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2462985342

FWCI: 1.044

Cites:

Cited by: 2

Related to: 10